532nm
20 W
TEMoo
0.4
<1.2
1-20
70
3
Liner (Vertical)
1
20
135mm*135mm*75mm
1 Micron or better
2 Micron/25mm
2 Micron/25 mm bi directional
Servo Drive with Encoder.
1270 mm* 620 mm* 1380mm
AC 208-230 V, 60 Hz, 5 AMPS.
No Requirement of External Chiller.