532nm
16w
TEMoo
1.0
<1.2
1-20
90
3
Liner (Vertical)
1
25
135mm*135mm*75mm
1 Micron or better
2 Micron/25mm
2 Micron/25 mm bi directional
Servo Drive with Encoder
1315 mm* 665 mm* 1480 mm
AC 208-230 V, 60 Hz, 5 AMPS.
No Requirement of External Chiller.